Shanghai Firm Challenges ASML Lead With Domestic DUV Lithography Tools
By Neetika Walter · Interesting Engineering · 2026-07-29

Interesting Engineering reports that a state-backed Shanghai manufacturer is set to deliver five immersion deep ultraviolet lithography systems this year, targeting domestic fabs like SMIC and Hua Hong. While these machines represent a significant technical milestone for China’s
Interesting Engineering reports that a state-backed Shanghai manufacturer is set to deliver five immersion deep ultraviolet lithography systems this year, targeting domestic fabs like SMIC and Hua Hong. While these machines represent a significant technical milestone for China’s