Chinese Researchers Prototype 3nm Transistor Logic Using Deep Ultraviolet Tools

By Bojan Stojkovski · Interesting Engineering · 2026-09-19

Interesting Engineering reports that the Chinese Academy of Sciences has successfully integrated gate-all-around CMOS transistors at a sub-3nm scale using deep ultraviolet lithography. This development aims to bypass international trade restrictions that currently block Chinese f

Interesting Engineering reports that the Chinese Academy of Sciences has successfully integrated gate-all-around CMOS transistors at a sub-3nm scale using deep ultraviolet lithography. This development aims to bypass international trade restrictions that currently block Chinese f